Journal Articles Applied Physics Letters Year : 2014

Monolithic integration of common mode filters with electrostatic discharge protection on silicon/porous silicon hybrid substrate

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Acoustics [physics.class-ph]

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https://univ-tours.hal.science/hal-02183299

Submitted on : Monday, July 15, 2019-11:22:36 AM

Last modification on : Tuesday, September 17, 2024-6:28:03 PM

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hal-02183299 , version 1 (15-07-2019)

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Marie Capelle, Jérôme Billoue, J. Concord, P. Poveda, G. Gautier. Monolithic integration of common mode filters with electrostatic discharge protection on silicon/porous silicon hybrid substrate. Applied Physics Letters, 2014, 104 (7), pp.072104. ⟨10.1063/1.4866162⟩. ⟨hal-02183299⟩

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