@article{guillon:hal-03980029, TITLE = {{The influence of Al 2 O 3 nanolamination in ALD ZrO 2 capacitor on physical and electrical characteristics}}, AUTHOR = {Guillon, Virgil and Riou, Benoit and Billou{\'e}, J{\'e}r{\^o}me and Defforge, Thomas and Gardes, Pascal and Bah, Micka and Gautier, Ga{\"e}l}, URL = {https://univ-tours.hal.science/hal-03980029}, JOURNAL = {{Journal of Applied Physics}}, PUBLISHER = {{American Institute of Physics}}, VOLUME = {132}, NUMBER = {23}, PAGES = {234103}, YEAR = {2022}, MONTH = Dec, DOI = {10.1063/5.0128507}, HAL_ID = {hal-03980029}, HAL_VERSION = {v1}, }