@proceedings{berger:hal-03981955, TITLE = {{Optimisation of Ti Ohmic Contacts Formed by Laser Annealing on 4H-SiC}}, AUTHOR = {Berger, Cl{\'e}ment and Alquier, Daniel and Michaud, Jean Fran{\c c}ois}, URL = {https://univ-tours.hal.science/hal-03981955}, PUBLISHER = {{Trans Tech Publications Inc.}}, VOLUME = {1062}, PAGES = {219-223}, YEAR = {2022}, MONTH = May, DOI = {10.4028/p-6z36aj}, KEYWORDS = {Titanium Ohmic contact Laser annealing Interfaces 4H-SiC Materials Science Forum ; Titanium ; Ohmic contact ; Laser annealing ; Interfaces ; 4H-SiC Materials Science Forum}, PDF = {https://univ-tours.hal.science/hal-03981955/file/MSF.1062.219.pdf%3B%20filename%2A%3DUTF-8%27%27MSF.1062.219.pdf}, HAL_ID = {hal-03981955}, HAL_VERSION = {v1}, }