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The influence of Al 2 O 3 nanolamination in ALD ZrO 2 capacitor on physical and electrical characteristicsJournal of Applied Physics, 2022, 132 (23), pp.234103. ⟨10.1063/5.0128507⟩
Journal articles
hal-03980029v1
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Structural and electrical properties of ZrO2/Al2O3/ZrO2 3D MIM capacitor deposited by Atomic Layer DepositionInternational Conference on Electronics, Communications and Control Engineering (ICECC 2022), Mar 2022, Fukuoka (virtual event), Japan
Conference papers
hal-03980956v1
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