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The influence of Al 2 O 3 nanolamination in ALD ZrO 2 capacitor on physical and electrical characteristics

Virgil Guillon , Benoit Riou , Jérôme Billoué , Thomas Defforge , Pascal Gardes et al.
Journal of Applied Physics, 2022, 132 (23), pp.234103. ⟨10.1063/5.0128507⟩
Journal articles hal-03980029v1